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Low Profile Rotary Air Bearing Stages With Superior Accuracy: A-635/A-637 PIglide

Source: PI (Physik Instrumente) LP

Low Profile Rotary Air Bearing Stages With Superior Accuracy: A-635/A-637 PIglide

PI offers new A-635/A-637 PIglide low profile, rotary air bearing stages designed with superior accuracy for high-end industrial applications such as inspection, metrology, calibration, and scanning. The stages have no rolling or sliding elements and feature frictionless, non-contact motion for negligible reversal error, better wobble, eccentricity, and velocity stability. They also feature a virtually unlimited life, as there are no parts that wear or require maintenance.

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The PIglide rotary stages include 3-phase, low-cogging slotless torque motors with velocity to 500 rpm and optical encoders. These stages provide 0.0015 µrad resolution ±2 µrad bidirectional repeatability and absolute accuracy of ±6 µrad (with error compensation and ACS motion controller). Geometric performance is also excellent with 50nm flatness, ±50 nm radial runout and 1 µrad wobble. Models are available in two diameter sizes of 200 or 300 mm, and various options may be combined to create point-to-point indexing or constant velocity scanning solutions.

For more information on the A-635/A-637 PIglide stages, download the datasheet.

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